Metrology has grown significantly, especially in semiconductor manufacturing, and such growth necessitates increased expertise. Until now, this field has never had a book written from the perspective of an engineer in a modern IC manufacturing and development environment. The topics in this Tutorial Text range from metrology at its most basic level to future predictions and challenges.
Название | Introduction to Metrology Applications in IC Manufacturing Tutorial Texts Tutorial texts in optical engineering |
Авторы | Bo Su , Eric Solecky , Alok Vaid |
Издание: | иллюстрированное |
Издатель | SPIE, 2015 |
ISBN | 1628418117, 9781628418118 |
Количество страниц | Всего страниц: 164 |
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Экспорт цитаты | BiBTeX EndNote RefMan |