Introduction to Metrology Applications in IC Manufacturing

Metrology has grown significantly, especially in semiconductor manufacturing, and such growth necessitates increased expertise. Until now, this field has never had a book written from the perspective of an engineer in a modern IC manufacturing and development environment. The topics in this Tutorial Text range from metrology at its most basic level to future predictions and challenges.

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Название Introduction to Metrology Applications in IC Manufacturing
Tutorial Texts
Tutorial texts in optical engineering
Авторы Bo Su , Eric Solecky , Alok Vaid
Издание: иллюстрированное
Издатель SPIE, 2015
ISBN 1628418117, 9781628418118
Количество страниц Всего страниц: 164
  
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